16th European Conference EMC on Mask Technology for Integrated Circuits and Micro-Components '99
: lectures held at the GMM conference, November 15 - 16, 1999 in Munich, Germany / conference chairperson: Uwe Behringer. Organizer: VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe) .... - Berlin : VDE-Verl., 1999. - 227 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 30)
ISBN 978-3-8007-2503-8 / 3-8007-2503-7 kart. : DM 72.00, sfr 65.50, S 526.00
Literaturangaben
Quelle: DNB
EMC 2000
: lectures held at the GMM conference, November 13 - 14, 2000 in Munich-Unterhaching, Germany / 17th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Eq. - Berlin : VDE-Verl., 2000. - 201 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 32)
ISBN 978-3-8007-2587-8 / 3-8007-2587-8 kart. : DM 105.00, EUR 53.69, sfr 93.50, S 767.00
Literaturangaben
Quelle: DNB
EMC 2002
: lectures held at the GMM conference, January 15 - 16, 2002 in Munich, Germany / 18th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Eq. - Berlin : VDE-Verl., 2002. - 219 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 36)
ISBN 978-3-8007-2663-9 / 3-8007-2663-7 kart. : EUR 58.80, sfr 98.90
Literaturangaben
Quelle: DNB
EMC 2003
: lectures held at the GMM conference, January 13 - 15, 2003 in Sonthofen, Germany / 19th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Eq. - Berlin : VDE-Verl., 2003. - 310 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 39)
ISBN 978-3-8007-2748-3 / 3-8007-2748-X kart. : EUR 80.00 (DE), EUR 81.90 (AT), sfr 128.00
Literaturangaben
Quelle: DNB
EMLC 2005
: lectures held at the GMM conference, January 31 - February 03, 2005 in Dresden, Germany / 21th European Mask and Lithography Conference EMLC (former EMC). Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Equipment and Materials Internat. - Berlin : VDE-Verl., 2005. - 297 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 45)
ISBN 978-3-8007-2875-6 / 3-8007-2875-3 kart. : EUR 150.00, sfr 237.00
Literaturangaben
Quelle: DNB Verlagsmeldungen
EMLC 2006
: lectures held at the GMM conference, January 23 - 26, 2006 in Dresden, Germany ; with CD-ROM / 22nd European Mask and Lithography Conference EMLC. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with: BACUS .... - Berlin : VDE-Verl., 2006. - 351 S. : Ill., graph. Darst.; 30 cm - (GMM-Fachbericht; 49)
ISBN 978-3-8007-2931-9 / 3-8007-2931-8 kart. : EUR 120.00, sfr 190.00
Literaturangaben
Quelle: DNB Verlagsmeldungen
EMLC 2007
: lectures held at the GMM conference, January 22 - 26, 2007 in Grenoble, France / 23rd European Mask and Lithography Conference ... Uwe Behringer, conference chair, ed. .... - Berlin : VDE-Verl., 2007. - 1 CD-ROM : farb.; 12 cm - (Proceedings / SPIE, International Society for Optical Engineering; Vol. 6533)
ISBN 978-3-8007-3032-2 / 3-8007-3032-4 : EUR 180.00
Titel auf dem Behältnis
Quelle: DNB Verlagsmeldungen
EMLC 2008
: lectures held at the GMM conference, January 21 - 24, 2008 in Dresden, Germany ; proceedings / 24th European Mask and Lithography Conference ... Uwe Behringer, conference chair, ed. .... - Berlin : VDE-Verl., 2008. - 1 CD-ROM; 12 cm
ISBN 978-3-8007-3079-7 / 3-8007-3079-0 : EUR 175.00
Titel auf dem Behältnis
Quelle: DNB Verlagsmeldungen
